클린룸 리소(Lithography, milling) 장비
집속 이온 빔(FIB) Focused Ion Beam(FIB)
| 모델명 | Helios 5 UC |
|---|---|
| 제조사(제조국) | Thermo Fisher Scientific |
| 구입연도(제작연도) | 2023-12 |
| 용도 | (Cross Section) Milling, TEM Lamella 제작 등 |
| 사용료 | |
| 장소 | 22-220 |
성능
(1) Electron Beam Resolution - 0.6nm at 30 kV- SE resolution - 0.7nm at 1 kV SE resolution (2) Accelerating voltage : 350 V to 30 kV (3) Magnification : 8x to 1,280Kx (4) High stability Schottky thermal field emitter and available unicolor optics. (5) Heated objective apertures to extend aperture lifetime - Ion beam resolution(FIB mode) (1) 2.5 nm at 30 kV - Field emission gun (1) Probe current: 0.8pA to 100nA - High Throughput ion column optics (1) High-current ion column with Ga liquid-metal ion source for use in high vacuum (2) Acceleration voltage: 0.5 to 30 kV (3) Probe current: 0.1 pA to 100 nA |
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