물성분석실

물성분석실에서는 시료 합성 및 성장, 시료의 물성 측정, 그리고 이를 이용한 소자 제작에 필요한 다양한 장비를 한 곳에서 이용할 수 있습니다. 또한, 헬륨 액화기를 보유하고 있어 저렴한 가격으로 안정적인 액체 헬륨 공급이 가능합니다.
(위치 : 서울대학교 19동 4층)

<장비 사용 안내>
게시판/공지사항/물성분석실 장비이용안내
https://iap.snu.ac.kr/boards/announcement?md=v&bbsidx=396

<장비관리자>
송인경 (iksong@snu.ac.kr, 02-6415-7783), 김영찬 (kyc1607@snu.ac.kr, 02-6415-7781)

1. Device Fabrication E-beam Evaporator E-beam Evaporator
1. Device Fabrication Ion Miller Ion Miller
1. Device Fabrication Mask Aligner UV Patterning System
1. Device Fabrication Plasma Asher Plasma Asher
1. Device Fabrication RF & DC Magnetron Sputter RF & DC Magnetron Sputter
1. Device Fabrication RIE Reactive Ion Etching
1. Device Fabrication Stylus Profiler Stylus Profiler
1. Device Fabrication Wedge Wire Bonder Wedge Wire Bonder
2. Surface Characterization AFM Atomic Force Microscope
3. Crystal Structure Measurement HR-XRD High Resolution X-ray Diffraction
3. Crystal Structure Measurement Powder XRD Powder X-ray Diffraction
4. Transport Measurement Cryogenic Probe Station Cryogenic Probe Station
4. Transport Measurement MPMS Magnetic Property Measurement System
4. Transport Measurement PPMS 1 Physical Property Measurement System 1
4. Transport Measurement PPMS 2 Physical Property Measurement System 2
4. Transport Measurement PPMS 3 Physical Property Measurement System 3
5. Optical Parameter Measurement Ellipsometer (IR) Ellipsometer (IR)
5. Optical Parameter Measurement Ellipsometer (UV, VIS, NIR) Ellipsometer (UV, VIS, NIR)
5. Optical Parameter Measurement FT-IR Spectrometer FT-IR Spectrometer
6. Sample Synthesis & Growth Optical Floating Zone Furnace Optical Floating Zone Furnace
6. Sample Synthesis & Growth PECVD Plasma Enhanced Chemical Vapor Deposition
7. Infrastructure Helium Liquefier Helium Liquefier