보유장비 및 예약

● 전자선을 샘플 표면에 주사하여 전자선이 한곳에 집중되면 1차 전자만 굴절되고 표면에서 발생된 2차 전자를 수집하여 그 신호들을 형상화 시키는 현미경
● EDS(Energy Dispersive Spectrometer)가 부착되어 있어 시편의 성분과 표면에 관한 연구 수행이 가능
● Resolution in high-vacuum mode :
SE : 1.2nm at 30keV , STEM : 0.8nm at 30keV
● Resolution in low-vacuum mode :
BSE : 2.0nm at 30keV
● Working vacuum
● chamber high vacuum mode : <9*10^-3Pa
● chamber low vacuum mode (available only for UniVac) : 7-500Pa
● gun vacuum : <3*10^-7Pa
● Electron optics working modes
high-vacuum mode : Resolution, Depth, Field, Wide field, channelling
low-vacuum mode : Resolution, Depth
● Magnification : continuous from : 1*1,000,000*(XM)
(for 5“ image width in continual Wide field / Resolution mode)
● Field of view : 6.4mm at WD 10mm
● Accelerating / landing voltage : 200V to 30kV
● Electron gun : High brightness schottky Emitter
● Probe current : 2pA to 200nA
● Scanning speed : From 20ns to 10ms per pixel adjustable in steps or continuously