Clean room Others
spin coater
| Model | ACE200 |
|---|---|
| Manufacturer (Country) | DONG AH TRADE Corp.(Kor) |
| Purchase Date | 2013-04-03 |
| Purpose of Use | Monitoring photo/E-beam lithography development and imaging |
Product Description and Specifications● Wafer size (max.): piece to 4" diameter, 6"
● Bowl size: 235 m/m Bowl ● Bowl material: SUS (option: P.P, Tefelon, etc) ● Special DC Motor: Up & Down free ● Step: 100 step ● Memory storage: 100 program ● Rotation Speed: 0 to 50-8,000 rpm ● Hold Time: 1-999sec ● Accuracy: ± 1 R.P.M ● acceleration, deceleration free: 3,000 R.P.M/sec ● Graphic Fuction: Real time for steps (graphical display of spin speed) ● Power Input: AC 220V, 50/60Hz ● Vacuum Input: -450~-650mmHg (6mm ID / 8mm OD) ● Display: LCD (Back Light) ● System Controller: MCU (Digital Microprocess) ● Dimension (W X D X H): 320 X 420 X 220 mm ● Free speed control: 0 or in the range of 50- 8,000 at the rate of 3,000 or 6,000/s ● Freely selectable of spin coater setting: 100 steps and 100 programmable modes and real-time graphical monitoring of the coating process at each step ● Spin controller program: simple, user-friendly operation ● Real-time RPM checking against the configured RPM ● Simple repair: simple architecture of spin motor + power supply + simple controller (board), which makes repair as simple as PC upgrade (2-3 days). ● Heavy-duty motor for spin coater lined to the monitoring program: high RPM; real-time graphical monitoring of spin operation; easy coating data output ● Position control function: optimized sample handling by facilitating the loading of sample (e.g., wafer and glass) at the desired position ● Stable coating process at low and high RPM (50-8,000 rpm ) |
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