Clean room
It is a laboratory specially designed for device manufacturing and maintains constant temperature and humidity 24 hours a day, 365 days a year. We use air shower and air purification system to keep dust from the outside and we always maintain a clean environment.
-
Others OM (optical microscope)
-
Others Stereo Microscope
-
Others Wire bonder
-
Others DI generator
-
Others spin coater
-
Lithography and milling machine Maskless Photo Lithography System
-
Lithography and milling machine FE-SEM(Field Emission-Scanning Electron Microscope
-
Etching machine RIE(reactive ion etcher)
-
Etching machine XeF2 etcher
-
Deposition machine ALD(Atomic Layer Deposition)
-
Deposition machine E-beam Evaporator
-
Measurement instrument Keithly US
-
Measurement instrument Probe Station
-
Measurement instrument AFM (Atomic Force Microscope)