Clean room
It is a laboratory specially designed for device manufacturing and maintains constant temperature and humidity 24 hours a day, 365 days a year. We use air shower and air purification system to keep dust from the outside and we always maintain a clean environment.
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Others OM (optical microscope)
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Others Stereo Microscope
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Others DI generator
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Others spin coater
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Lithography and milling machine Maskless Photo Lithography System
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Lithography and milling machine Focused Ion Beam(FIB)
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Lithography and milling machine FE-SEM(Field Emission-Scanning Electron Microscope
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Etching machine RIE(reactive ion etcher)
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Etching machine XeF2 etcher
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Deposition machine Thermal Evaporator
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Deposition machine ALD(Atomic Layer Deposition)
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Deposition machine E-beam Evaporator
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Measurement instrument Keithly US
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Measurement instrument AFM (Atomic Force Microscope)