INSTITUTE OF APPLIED PHYSICS

List

Material Analysis Laboratory 1. Device Fabrication

E-beam Evaporator

Model KVET-IM2002L
Manufacturer (Country) 코리아바큠테크(주)
Purchase Date 2014-04-03
Purpose of Use Metal and Oxide Deposition

Product Description and Specifications

  • Deposition source (metal) : Ti, Pt, Au, Cr (Available material : Al)
  • Wafer size : 4“ 이내
  • Substrate rotation : 0 ~ 30 RPM
  • Process chamber : SUS304 / front door type
  • loadlock chamber & Automatic sample transfer device
  • Vacuum pumping station : Cryo pump & Dry pump
  • E-beam source : 4 pocket 7cc crucible / 270 degree deflection
  • Thermal source : Not used
  • Ultimate Pressure : < 3.0E-8Torr
  • System Control : PLC based PC auto
E-beam Evaporator