Material Analysis Laboratory 1. Device Fabrication
Stylus Profiler
| Model |
DektakXT-E |
| Manufacturer (Country) |
BRUKER |
| Purchase Date |
2014-01-20 |
| Purpose of Use |
나노 단위의 단차 측정 |
Product Description and Specifications
- High Aspect ratio stylus tip : 45 deg Cone Angle
- Stylus size : 50 nm ~ 25 μm
- Starter stylus size : 2 μm or 12.5 μm radius standard
- High-definition camera : B/W camera or color camera
- Measurement capability : Two-dimensional surface profile measurement
- Step Height repeatability : 5Å 1sigma on nominal 1000Å vertical step height standard
- Scan length 50 mm (Linear scan method)
- Sensor type : Thermally stable LVDT sensor (up to 1Å vertical resolution)
- Stylus exchange : stylus held in sensor magnetically with kinematic mount
- Vertical range : Up to 1mm vertical measurement range
- Vertical resolution : 1Å. max. (at 6.55 μm range)
- Stylus force : 1-15 mg. (down to 0.03mg. optional)
- X-Y sample positioning : Manual 100mm (4“) X/Y Manual leveling with no vacuum capabitliy and no rotation available
|
