Material Analysis Laboratory 5. Optical Parameter Measurement
Ellipsometer (UV, VIS, NIR)
| Model |
M2000DI |
| Manufacturer (Country) |
J.a.woollam |
| Purchase Date |
2017-10-17 |
| Purpose of Use |
시료의 광학적 특성 측정 |
Product Description and Specifications
- Ellipsometer configuration : Dual RCE
- Wavelength range : 193-1690 nm
- Number of wavelengths : 690 wavelengths
- Detector : CCD
- Angles of incidence : 45°-90° (Automated angle base) : 20°-90° (Vertical automated angle base) : ~65° (Focused base) : 65° (Fixed angle base) : 65° (Test base)
- Data acquisition rate : 0.05 seconds (2-5 seconds is typical)
- Max substrate thickness : 18 mm
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