INSTITUTE OF APPLIED PHYSICS

List

Clean room Measurement instrument

AFM (Atomic Force Microscope)

Model NX10
Manufacturer (Country) Park systems (KOR)
Purchase Date 2014-12-26
Purpose of Use Optical measurement of the interatomic forces on a sample surface using an ultrafine metal tip (cantilever); Sample surface scan by detecting the Van der Waals force acting between the cantilever tip and the atoms on the sample surface; Image generation using the position of the laser reflected from the cantilever tip.

Product Description and Specifications

▶ XY Scanner
Single module flexure XY-scanner with closed-loop control
50 µm × 50 µm (optional 10 µm × 10 µm or 100 µm × 100 µm)
Resolution: 0.05 nm
Position detector noise: < 0.25 nm (bandwidth: 1 kHz)
Out-of-plane motion: < 2 nm (over 40 µm scan)

▶ Motorized Stage
Sample size: up to 50 mm x 50 mm, up to 20 mm thickness
Sample weight: up to 500 g
XY stage travel: 20 mm x 20 mm
Z travel: 25 mm
Focus travel: 15 mm

▶ Z Scanner range
Guided high-force flexure scanner
Scan range: 15 µm (optional 30 µm)
Resolution: 0.015 nm
Position detector noise: 0.03 nm (bandwidth: 1 kHz)
Resonant frequency: > 9 kHz (typically 10.5 kHz)

● Atomic-scale resolution depending on the diameter of the tip (nm)
● Contact mode: detecting interatomic repulsive forces
● Non-contact mode: detecting attractive forces between sample and tip (Van der Waals force)
● Tapping mode: gathering sample surface information through constant wide-amplitude oscillation and intermittent tip-sample contact
● Sample analysis without pretreatment (except for liquid samples)
원자 힘 전자 현미경(AFM)